Sun, 09 Jan 2011
Visualizing my Ph.D. work
I finished my Ph.D. thesis about electrostatic micromechanical devices in April 2010 (Buy). Originally I wanted to print a small flip-book in the header or footer visualizing my work, but discarded the plan after seeing some eyebrow raising of my proof readers.
I still had the idea in mind though and after some tinkering around implemented an animation with Povray.
To get a paper flip-book from that, the images have to be distributed over a piece of paper. As I don't like office applications very much, I ended up writing a small Python script which creates a PDF employing the excellent pypdf package. The result just lacks some cutting lines.
All necessary files are in this git repository.
posted at 21:00 | path: /personal | permanent link to this entry
Sun, 01 Aug 2010
Personal bibliography
- Untersuchungen zur Messung elektrischer Spannungen mit mikroelektromechanischen Bauelementen URL
- A miniaturized RMS voltage sensor based on a torsional actuator in bulk silicon technology Proceedings of Micro- and Nano Engineering 769-770 2007 Search
- Aufbau und Charakterisierung eines mikro-elektromechanischen Torsionssensors fšr die Hochfrequenzspannungsmessung Mikrosystemtechnik Kongress 2007 775-758 2007 Search
- Specialized hybrid batch fabrication process for MEMS RF voltage sensors Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV 680000P-1-680000P-9 2007 DOI
- Micro-Electromechanical devices for RF voltage metrology applications 11th International Conference on New Actuators 322-324 2008 Search
- A torsional sensor for MEMS-based RMS voltage measurements Advances in Radio Science 6 31-34 2008 Search
- Optimization of spring geometries for the suspension of an electrostatic RMS voltage sensor The International Conference on MEMS and Nanotechnology 177-180 2008 Search
- A miniaturized RMS voltage sensor based on a torsional actuator in bulk silicon technology Microelectronic Engineering 85 5 1437-1439 2008 Search
- Micro-fabricated electrostatic voltage sensor with variable parallel-plate capacitor 34th International Conference on Micro & Nano Engineering 354 2008 Search
- Modeling and design of electrostatic voltage sensors based on micromachined torsional actuators NSTI Nanotech 3 521-524 2008 Search
- Electrostatic voltage sensors based on micro machined rotational actuators: Modeling and design Sensors and Transducers 3 80-86 2008 Search
- Electrostatic voltage sensor based on a high aspect-ratio copper actuator leviating over a small air gap Mikrosystemtechnik Kongress 385-388 2009 Search
- Surface micro-machined RMS and DC voltage sensor with a copper actuator using an intermediate sacrificial layer Micro and Nano Engineering 2009 P-MEMS-22 2009 Search
- Reliability study of micromechanical actuators for electrostatic RMS voltage measurements using bulk-silicon technology Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII 7206 1 72060C 2009 URL DOI
- DC and RMS voltage measurements with microelectromechanical sensors based on silicon actuators Eurosensors XXIII, Book of Abstracts 416 2009 Search
- DC and RMS voltage measurements with microelectromechanical sensors based on silicon actuators Procedia Chemistry 1 1 1399-1402 2009 URL DOI
- Capacitive parallel-plate voltage sensor made of electroplated copper on a sacrificial layer 8th International Workshop on High Aspect Ratio Micro Structure Technology 189-190 2009 Search
- Micro-fabricated electrostatic voltage sensor with a thin bulk-silicon device layer NSTI Nanotech 2009 1 472-475 2009 Search
- Evaluation of microelectromechanical devices for DC and RF voltage measurements IEEE Sensors Proceedings 2009 Search
- Micro-fabricated rotational actuators for electrical voltage measurements employing the principle of electrostatic force Sensors and Transducers 7 25-33 2009 URL
- Untersuchungen von MEMS zur HF-Spannungsmessung Aktuelle Fortschritte von Kalibrierverfahren im Nieder- und Hochfrequenzbereich 2010 2010 Search
- RMS voltage sensor based on a variable parallel-plate capacitor made of electroplated copper Microsystem Technologies 16 8 1665-1671 2010 DOI
- A systematic approach to wall roughness effects in laminarchannel flows: experiments and modelling Proceedings of the Sixth International Conference on Nanochannels, Microchannels and Minichannels 2008 Search
- Silicon grating microfabrication for long-range displacement sensor Journal of Micro/Nanolithography, MEMS and MOEMS 7 2 021007 2008 URL DOI
- Contactless micro position and angular sensor device based on micro structured polymer magnets NSTI Nanotech 1 468-471 2009 Search
posted at 12:00 | path: /personal | permanent link to this entry
RF MEMS Literature
- Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating Microsystem Technologies 13 3 343-347 2007 URL
- A wireless batch sealed absolute capacitive pressure sensor Sensors and Actuators A 95 1 29-38 2001 URL DOI
- Analysis of a MEMS transmission line IEEE Transactions on Microwave Theory and Techniques 51 8 1977-1981 2003 Search
- Wideband microwave power sensor based on MEMS technology Conference on Precision Electromagnetic Measurements Digest 115-116 2004 DOI
- Tensile-mode fatigue testing of silicon films as structural materials for MEMS Sensors and Actuators A 93 1 70-75 2001 URL DOI
- Characterization of silicon microstructures by feedback interferometry Journal of Optics A: Pure and Applied Optics 4 6 311-317 2002 URL
- Two movable-plate nitride-loaded MEMS variable capacitor IEEE Transactions on Microwave Theory and Techniques 52 3 831-837 2004 DOI
- Low-cost low actuation voltage copper RF MEMS switches IEEE MTT-S International Microwave Symposium Digest 2 1225-1228 2002 DOI
- Squeeze film air damping in MEMS Sensors and Actuators A 136 3-27 2007 DOI
- Bulk-micromachined electrostatic RMS-to-DC converter: Design and fabrication Tech. digest MME 2000, October 1--3, Uppsala, Sweden A14 2000 Search
- Capacitive Sensors, Design and Application 1997 Search
- International comparison of voltage (1 V) in coaxial line at frequencies up to 1 GHz Metrologia 20 4 115-126 1984 URL
- Dubbel - Taschenbuch fuer den Maschinenbau 1995 Search
- Micromechanical device for the measurement of the RMS value of high-frequency voltages Proceedings of IEEE Sensors 1 631-635 2003 Search
- Entwicklung einer mikromechanischen Struktur zur Messung der Kraftwirkung elektrischer Spannungen 2004 Search
- Volumenmikromechanische Intertialsensoren 2004 Search
- Konzeption und Aufbau eines Messplatzes für die Auswertung elektrostatisch angetriebener mikromechanischer Sensoren mit kapazitiver Rückkopplung 2008 Search
- Radio-frequency power measurements with the quadrant electrometer Proceedings of the Institute of Radio Engineers 23 958-971 1935 Search
- Metal to glass anodic bonding for microsystem packaging IEEE Transducers 1824-1827 2003 Search
- Materials reliability in MEMS devices Transducers Proceedings 591-593 1997 Search
- Entwurf und Aufbau eines Ladungsverstärkers zur Messung kleinster Kapazitäten 2009 Search
- Characterisitics of single junction thermal converters Conference on Precision Electromagnetic Measurements Digest 228-229 2000 DOI
- Three-axes monolithic silicon low-g accelerometer Journal of Microelectromechanical Systems 9 4 551-556 2000 DOI
- Mikromechanik 1994 Search
- RF components and circuits 2002 Search
- Micromotor technology: electric drive designer's perspective presented at the 2001 IEEE Industry Applications Society Annual Meeting, October 3, 2001 2001 Search
- An on-chip, attofarad interconnect charge-based capacitance measurement (CBCM) technique Electron Devices Meeting, 1996., International 69-72 1996 Search
- Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor IEEE Transactions on Electron Devices 50 3 2003 Search
- Fabrication of micro-inductor and capacior for RF MEMS applications Journal of Semiconductor Technology and Science 2 2 102-110 2002 Search
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors IEEE Transactions on Electron Devices 26 12 1887-1896 1979 Search
- Slow crack growth in single-crystal silicon Science 256 5063 1537-1539 1992 DOI
- A power sensor for fast measurement of telecommunications signalsusing substitution method IEEE Transactions on Instrumentation and Measurement 50 5 1190-1196 2001 Search
- Micromachined electro-mechanically tunable capacitors and theirapplications to RF ICs IEEE Transactions on Microwave Theory and Techniques 46 12 2587-2596 1998 URL DOI
- Microwave MEMS-based voltage-controlled oscillators IEEE Transactions on Microwave Theory and Techniques 48 11 1943-1950 2000 Search
- SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators Sensors and Actuators A 46 1--3 8-16 1995 URL DOI
- Integrated electrostatic RMS-to-DC converter using IC-compatible surface micromachining The 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX 1 130-133 1995 URL
- Integrated electrostatic RMS-to-DC converter fabricated in a BIFET-compatible surface-micromaching process 1996 Search
- On the influence of gravitation on the propagation of light Annalen Phys. 35 898-908 1911 Search
- Evaluation of platinum as a structural thin film material for RF-MEMS devices Journal of Micromechanics and Microengineering 19 6 065010(8pp) 2009 URL
- Technologien und Applikationen der UV-Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik 2007 Search
- Capacative MEMS application for high-frequency power sensor Proceedings of MME conference 2002 Search
- Novel RF power sensor based on MEMS technology Proceedings of MME conference 2003 Search
- High frequency power sensor based on MEMS technology Proceedings of IEEE Sensors 549-552 2003 Search
- Optimization of a capacitive MEMS power sensor for radio frequency applications MME 2004 2004 Search
- Development of a capacitive MEMS RF power sensor without dissipative losses: Towards a new philosophy of RF power sensing CPEM 2004 2004 Search
- Radio frequency power sensor based on MEMS technology with ultra low losses Proc. 18th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2005 191-194 2005 DOI
- A capacitive RF power sensor based on MEMS technology 2005 Search
- A capacitive RF power sensor based on MEMS technology Journal of Micromechanics and Microengineering 16 7 1099-1107 2006 URL
- There's plenty of room at the bottom Engineering and Science, Caltech 1960 Search
- Comparison of high-frequency AC-DC voltage transfer standards at NRC, VSL, PTB, and NIST IEEE Transactions on Instrumentation and Measurement 50 2 349-352 2001 DOI
- Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon Sensors and Actuators 83 194-199 2000 Search
- Wafer level micropackaging for RF MEMS switches Proceedings of IPACK2005 1-5 2005 Search
- Mechanical-thermal noise in micromachined acoustic and vibration sensors IEEE Transactions on Electron Devices 40 5 903-909 1993 DOI
- Switched - capacitor sigma - delta capacitance to digital converter suitable for differential capacitive sensors IEEE Instrumentation and Measurement Technology Conference Proceedings 1-5 2007 DOI
- Über neue eisenlose elektrodynamische Präzisions-Leistungsmesser hoher Empfindlichkeit Electrical Engineering (Archiv fur Elektrotechnik) 19 2 132-145 1927 DOI
- Automatic RF voltage calibration with a primary voltage standard upto 1 GHz IEEE Transactions on Instrumentation and Measurement 42 2 519-523 1993 Search
- Performance of low-loss RF MEMS capacative switches IEEE Microwave and Guided Wave Letters 8 8 269-271 1998 DOI
- Bulk micromachined electrostatic RMS-to-DC converter IEEE Transactions on Instrumentation and Measurement 50 6 2001 Search
- Principles of a new portable electrometer Physical Review 40 1932 Search
- Influence of van der waals and casimir forces on electrostatic torsional actuators Journal of Microelectromechanical Systems 13 6 1027-1035 2004 Search
- Untersuchung der Herstellung von ein- und zweiseitig eingespannten Brücken mit Verfahren der Oberflächenmikromechanik am Beispiel elektrostatischer Spannungssensoren 2009 Search
- Thermal converters as ACâDC transfer standards for current and voltage measurements at audio frequencies Journal of Research of the National Bureau of Standards 48 121-138 1952 Search
- Thermal sensors based on the Seebeck effect. Sensors and Actuators 10 321-346 1986 Search
- Mikromechanik 1989 Search
- Fatigue life of a microcantilever beam in bending Journal of Vacuum Science Technologies B 22 3143-3146 2004 Search
- Handbuch der Messtechnik 2007 Search
- Modelling squeeze film effects in a MEMS accelerometer with a levitated proof mass Journal of Micromechanical Microengineering 15 5 893-902 2005 DOI
- Submicron gap capacitor for measurement of breakdown voltage in air Review of Scientific Instruments 77 3 034702 2006 URL DOI
- Accurate and simple AC measurement to 500 kHz Linear Technology Magazine 2004 URL
- Evaluation of the synchronous generation and synchronous sampling technique for the determination of low frequency AC quantities Conference on Precision Electromagnetic Measurements 398-399 2002 DOI
- Evaluation of the synchronous generation and sampling technique IEEE Transactions on Instrumentation and Measurement 52 2 371-374 2003 DOI
- Speeding-up AC-DC transfer measurements with thermal converters IEEE Transactions on Instrumentation and Measurement 54 1 268-272 2005 DOI
- A method for the determination of AC-DC transfer errors in thermoelements IEEE Transactions on Instrumentation and Measurement 27 4 440-444 1978 DOI
- Current-independent AC-DC transfer errors in single-junction thermal converters IEEE Transactions on Instrumentation and Measurement 34 2 294-301 1985 DOI
- Standards for AC-DC transfer Metrologia 29 2 191-199 1992 URL
- International comparison of low voltage (0.001 V) and high voltage (100 V) in coaxial line at 30 MHz IEEE Transactions on Instrumentation and Measurement 44 2 312-315 1995 DOI
- Micromachined devices for space telecom applications Proceedings 3rd Round Table on Micro/Nano-Technologies for Space. ESA 135-140 2000 URL
- Design, modeling, fabrication and testing of a high aspect ratio electrostatic torsional MEMS micromirror Journal of Micromechanics and Microengineering 16 10 2147-2156 2006 URL
- Thin-film AC-DC converter with thermoresistive sensing IEEE Transactions on Instrumentation and Measurement 46 2 382-386 1997 Search
- Development of thin film multifunction thermal converters at NIST IEEE Transactions on Instrumentation and Measurement IM-46 347-351 1997 Search
- RMS to DC conversion application guide 1986 Search
- AC-DC transfer difference of the PTB-multijunction thermal converter in the frequency range from 10 Hz to 100 kHz IEEE Transactions on Instrumentation and Measurement 36 320-329 1987 Search
- Accurate thin film multijunction thermal converter on a silicon chip Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on 215-216 1988 Search
- Increasing the time constant of a thin film multijunction thermal converter for low frequency application IEEE Transactions on Instrumentation and Measurement 40 2 350-351 1991 DOI
- Development of thin-film multijunction thermal converters at PTB/IPHT IEEE Transactions on Instrumentation and Measurement 50 6 1490-1498 2001 DOI
- Improved SINIS josephson junction series array for the quantum voltmeter Conference on Precision Electromagnetic Measurements 386 2002 Search
- Low-cost, high-precision measurement system for capacitive sensors Measurement Science and Technology 9 3 510-517 1998 URL
- Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation Microsystem Technologies 5 30-37 1998 Search
- Taschenbuch der Elektrotechnik 2006 Search
- Long-term stability of single-crystal silicon microresonators Sensors and Actuators A 115 23-27 2004 Search
- Theoretische Elektrotechnik 2005 Search
- A micromechanical RMS-to-DC converter Digest, CPEM2000 699-700 2000 DOI
- Increasing the dynamic range of a micromechanical moving-plate capacitor Analog Integrated Circuits and Signal Processing 29 1--2 61-70 2001 DOI
- Stability of microelectromechanical devices for electrical metrology IEEE Transactions on Instrumentation and Measurement 50 6 1499-1503 2001 DOI
- Stability of electrostatic actuation of MEMS Physica Scripta Online T114 193 193-194 2004 URL
- EMMA - electro mechanical microcomponents for precision applications 2005 URL
- Optimized design and process for making a DC voltage reference based on MEMS IEEE Transactions on Instrumentation and Measuerment 54 2 563-566 2005 Search
- Stable SOI micromachined electrostatic AC voltage reference Microsystem Technologies 12 169-172 2005 Search
- MEMS-based AC voltage reference IEEE Transactions on Instrumentation and Measuerment 54 2 595-599 2005 Search
- Towards MEMS based electrical metrology XXXIV Fysiikan pÀivÀt 2005 Search
- MEMS based voltage reference 2006 Search
- Electrical stability of a MEMS-based AC voltage reference Sensors and Actuators A 137 1 169-174 2007 DOI
- Size and frequency of defects in silicon MEMS International Journal of Damage Mechanics 12 357-363 2003 Search
- Review of radio frequency microeletromechanical systems technology IEE Proceedings on Science Measurement and Technology 151 2 2004 Search
- An improved anodic bonding process using pulsed voltage technique Journal of Microelectromechanical Systems 9 4 469-473 2000 DOI
- A computerized model of vacuum thermocouple performance IEEE Transactions on Instrumentation and Measurement 40 2 356-359 1991 DOI
- Verfahren zum anisotropen Ätzen von Silizium 1992 Search
- Reviewing the basisc of microstrip lines Microwaves and RF 79-88 2000 Search
- Matlab R2007A 2007 URL
- Mikrosystemtechnik für Ingenieure 2005 Search
- Mikrosystemtechnik 2000 Search
- Magnetic casimir effect Physical Review 66 062102 2002 DOI
- A high-accuracy high-speed signal processing circuit of differential-capacitance transducers IEEE Transactions on Instrumentaion and Measurement 47 5 1998 Search
- Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates Journal of Micromechanics and Microengineering 15 2083-2092 2005 Search
- Fast synchronous AC-DC-Transfer with thermal converters Precision Electromagnetic Measurements Digest, 2004 Conference on 190-191 2004 Search
- High-cycle fatigue of single-crystal silicon thin films Journal of Microelectromechanical Systems 10 4 593-600 2001 DOI
- Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems Applied Physics Letters 80 9 1532-1534 2002 Search
- Quadrant electrometer 2009 URL
- Microelectromechanical capacitors for RF applications Journal of Micromechanics and Microengineering 12 2 177-186 2002 URL
- Microcoils and microrelays -- an optimized multilayer fabrication process Sensors and Actuators A 83 1--3 124-129 2000 URL DOI
- Electromechanical stability of capacitive transducers Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 4408 1 463-468 2001 URL DOI
- Design of low actuation voltage RF MEMS switch IEEE MTT-S International Microwave Symposium Digest 1 165-168 2000 Search
- Elektrostatische Messgeräte 1951 Search
- Squeeze film damping effect on the dynamic response of a MEMS torsion mirror Journal of Micromechanical Microengineering 8 200-208 1998 Search
- A low-temperature wafer bonding technique using patternable materials Journal of Micromechanics and Microengineering 12 5 611-615 2002 URL
- Electroplated RF MEMS capacitive switches The Thirteenth Annual International Conference on Micro Electro Mechanical Systems 639-644 2000 DOI
- Tunable millimeter-wave filters using a coplanar waveguide and micromachined variable capacitors Journal of Micromechanics and Microengineering 11 6 706-712 2001 URL
- Über die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drücken erforderliche Potentialdifferenz Annalen der Physik 273 5 69-96 1889 URL
- An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films ICEM12 - 12th International Conference on Experimental Mechanics 2004 Search
- Silicon as a mechanical material Proceedings of the IEEE 70 5 420-457 1982 Search
- The role of debris induced cantilever effects in cycle fatigue of micron-scale silicon films Fatigue Fract Engng Mater Struct 30 57-63 2006 Search
- A new scheme for generating and measuring active, reactive, and apparent power at power frequencies with uncertainties of 2.5e-6 IEEE Transactions on Instrumentation and Measurement 48 2 422-426 1999 DOI
- RF MEMS theory, design, and technology 2003 Search
- Eletrostatic charge and field sensors based on micromechanical resonators Journal of Microelectromechanical Systems 12 5 2003 Search
- Design of a pull-in voltage reference structure MME 2001 Search
- A path: from electroplating through lithographic masks in electronics to LIGA in MEMS Electrochimica Acta 42 20--22 2985-3005 1997 URL DOI
- RF-power: driver for electrostatic RF-MEMS devices Journal of Micromechanics and Microengineering 14 43-48 2004 Search
- DNQ-novolac photoresists revisited: 1H and 13C NMR evidence for a novel photoreaction mechanism Magnetic Resonance in Chemistry 41 2 84-90 2003 DOI
- RF MEMS circuit design for wireless communications 2002 Search
- Modeling of an electrostatic torsional actuator: demonstrated with an RF MEMS switch Sensors and Actuators A 97--98 337-346 2002 Search
- Quartz thin-film multijunction thermal converters with built-in tee connector for 100 MHz IEEE Transactions on Instrumentation and Measurement 56 2 571-575 2007 DOI
- Explanation for the ACâDC voltage transfer differences in thin-film multijunction thermal converters on silicon chips at high frequencies IEEE Transactions on Instrumentation and Measurement 56 2 567-570 2007 DOI
- A silicon condenser microphone with a silicon nitride diaphragm and backplate Journal of Micromechanics and Microengineering 2 187-189 1992 Search
- Wafer-to-wafer bonding for microstructure formation Proceedings of the IEEE 86 8 1575-1585 1998 DOI
- Model of thin-film microstrip line for circuit design IEEE Transactions on Microwave Theory and Techniques 49 1 2001 Search
- A novel linearly tunable MEMS variable capacitor Journal of Micromechanics and Microengineering 12 12 82-86 2001 Search
- Micromechanical AC and DC voltage reference system 1999 Search
- Microelectromechanical systems in electrical metrology IEEE Transactions on Instrumentation and Measurement 50 2 440-444 2001 DOI
- Microelectromechanical systems in metrology 2002 Search
- Microstrip phase shifter using ground-plane reconfiguration IEEE Transactions on Microwave Theory and Techniques 52 1 2004 Search
- Squeeze-film damping in solid-state accelerometers Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE 44-47 1990 Search
- Dynamics and squeeze film gas damping of a capacitive RF MEMS switch Journal of Micromechanics and Microengineering 15 176-184 2005 Search
- Microcavity interferometry for MEMS device characterization Journal of Microelectromechanical Systems 12 109-116 2003 Search
- Fertigung frei tragender Strukturen mit Oberflächenmikromechanik 2007 Search
- AC and DC voltage standards based on silicon micromechanics CPEM98 Conference Digest 23-24 1998 Search
- Electrostatically driven vacuum-encapsulated polysilicon resonators part ii. theory and performance Sensors and Actuators A 45 1 67-84 1994 URL
- The compton electrometer Journal of Scientific Instruments 3 11 381-384 1926 DOI
- Thermoelektrizität --- wikipedia, die freie enzyklopädie URL
- Taschenbuch der Hochfrequenztechnik 1992 Search
- Taschenbuch der Mathematik 2001 Search
- AD637 High Precision, Wideband RMS-to-DC Converter 2007 URL
- LTC1967 Precision Extended Bandwidth, RMS-to-DC Converter 2009 URL
- Casimir effect --- wikipedia, die freie enzyklopädie Wikipedia English 2009 URL
- RF MEMS and their applications 2003 Search
- Equivalent circuit model of the squeezed gas film in a silicon accelerometer Sensors and Actuators A 48 239-248 1995 Search
- The influence of gas-surface interaction on gas-film damping in a silicon accelerometer Sensors and Actuators A 66 83-92 1998 Search
- Finite-difference large-displacement gas-film model Transducers 1999 1999 Search
- Capacitive MEMS power sensor The 3rd Workshop on MEMS for Millimeterwave Communication 2002 Search
- Capacative RF MEMS power sensor 3rd ESA Workshop on Millimetre Wave Technology and Applications: Circuits, Systems, and Measurement Techniques. MilliLab 503-508 2003 Search
- Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (mems) Sensors and Actuators A 71 1--2 74-80 1998 URL DOI
- Multifunction thermal converter - an accurate d.c./a.c./transfer instrument Proc. IEE 112 794 1965 Search
- Fracture testing of bulk silicon microcantilever beams subjected to a side load Journal of Microelectromechanical Systems 5 3 142-150 1996 DOI
- Theoretical analysis of the effect of static charges in silicon-based dielectric thin films on micro- to nanoscale electrostatic actuation Journal of Micromechanical Microengineering 2004 URL
- Dielectric charging effects on parylene electrostatic actuators IEEE Proceedings of the 15 thIEEE International Conference on Micro Electro Mechanical Systems, 2002 2002 Search
- A high-sensitivity silicon accelerometer with a folded-electrode structure Journal of Microelectromechanical Systems 2003 Search
- Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches IEEE MTT-S International Microwave Symposium Digest 4 2005 DOI
- A study on the coupled dynamic characteristics for a torsional micromirror Microsystem Technologies 11 12 1301-1309 2005 DOI
- Development of a wide tuning range MEMS tunable capacitor for wireless communication systems Technical Digest International Electron Devices Meeting 403-406 2000 DOI
posted at 12:00 | path: /personal | permanent link to this entry